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DualBeam (FIB-SEM) Microscope System

MANUFACTURER Thermofisher (FEI) (manufacturer's website)
MODEL Scios 2
ACRONYM FIB
TRAINING Training is required to use this item and we can arrange this if needed.
CUSTODIAN Sam Davis
ADDITIONAL CONTACT Stuart Robertson
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SITE West Park

Description

The Dual Beam FIB consists of a high resolution field emission electron column and gallium source ion column combined within the same instrument. This allows milling of cross sections (typically 20 x 5 microns) through samples and subsequent imaging using either electrons or ions.

Typical applications

Ancillary equipment

  • Oxford Instruments X-Max infinity, Energy-dispersive X-ray microanalysis (EDS) System.
  • Oxford Instruments Symmetry 2, Electron Backscatter Diffraction (EBSD) system.
  • High speed electrostatic beam blanker.
  • Easylift micromanipulator.
  • 2 Gas Injectors (Tungsten and Insulator enhance etch (IEE)).
  • Retractable backscatter detector with low voltage capability.

Specification

Resolution @ optimum WD 1.4 nm @ 1 kV 1.2 nm @ 1 kV (Beam deceleration*)

Detectors available

  • T1 segmented lower in-lens
  • T2 upper in-lens detector
  • T3 in-column detector

Item ID #244.

Last Updated: 6th November, 2026

DualBeam (FIB-SEM) Microscope System