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Gold Sputter Coater/ Carbon Evaporator

MANUFACTURER Quorum (manufacturer's website)
MODEL Q150T ES
AVAILABILITY Upon Request
TRAINING Training is required to use this item and we can arrange this if needed.
CUSTODIAN Keith Yendall
ADDITIONAL CONTACT Scott Doak
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SITE Main Campus

Description

Bench-top turbomolecular-pumped coating system suitable for SEM, TEM and many thin film applications. Predominately used as a high resolution sputter and high vacuum carbon coater.

The system is capable of metal sputtering, with appropriate targets, some of which include: Aluminium, copper, cobalt, chromium, germanium, gold, gold/palladium, indium tin oxide (ITO), iridium, iron, manganese, molybdenum, platinum, palladium, silver, tin, tantalum, titanium and tungsten as well as carbon evaporation to produce conductive coatings and TEM replicas.

Features

  • Fine grain sputtering for advanced high resolution FE-SEM applications
  • High vacuum turbo pumping
  • Pulsed or ramped carbon coating modes
  • Enhanced sputtering of aluminium using optimised pulse cleaning
  • Fully automatic touch screen control
  • Ideal for SEM, high resolution FE-SEM and TEM applications
  • Equipped with Gold sputter coater and Carbon coating head.
  • Tilt stage assembly
  • Standard and extended height chamber for tall specimens

Specification

Chamber diameter: 165mm

Upgrades

Extended height chamber, a new carbon rod shaper tool and finally a software upgrade. All of which allows for a more controllable and reproducible carbon coating.

Future Upgrades

Precise thickness control using the film thickness monitor option

Item ID #929.

Last Updated: 20th June, 2013

Gold Sputter Coater/ Carbon Evaporator