Helios G4 PFIB UXe DualBeam Microscope

Helios G4 PFIB delivers unmatched capabilities for large volume 3D characterization, Ga+free sample preparation and precise micromachining. Helios G4 PFIB UXe is part of the fourth generation of the industry leading Helios DualBeam family. It combines the new PFIB 2.0 column and the Monochromated Elstar™ SEM column to deliver the most advanced focused ion- and electron beam performance. Intuitive software and an unprecedented level of automation and ease-of-use provide observation and analysis of relevant subsurface volumes by scientists and engineers.

Ancillary equipment

• Oxford Instruments Ulti-Max, Energy-dispersive X-ray microanalysis (EDS) System.
• Oxford Instruments Summetry S3, Electron Backscatter Diffraction (EBSD) CMOS detector.
• Micromanipulator.
• Multi-Gas Injector (Platinum, Tungsten, Carbon and Insulator enhance etch (IEE)).
• Solid state retractable backscatter detector.
• STEM (Scanning transmission electron microscopy) retractable detector.
• Gatan Monarc Pro CL (Cathodoluminescence) retractable detector.