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Polaron Emitech SC7640 Sputter Coater

MANUFACTURER Polaron
MODEL Emitech SC7640 Sputter Coater
TRAINING Training is required to use this item and we can arrange this if needed.
CUSTODIAN Keith Yendall
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SITE Main Campus

Description

Bench-top sputter coating system with 165mm chamber and gold/palladium sputtering target. The sputter coater produces a fine grain, even coating ideally suited for depositing layers over a wide area. Typical applications include coating of non-conducting SEM or TEM samples. Coating thickness depends on time and current, but normally in the region of 1-20 nanometers.

The coating time is monitored with a 999 second timer with 1 second resolution. Pressure levels and plasma currents are monitored by analogue meters.

Two modes of operation:

  • Automatic, for standard coatings
  • Manual operation, Complete control of all parameters.

Sample stage is height adjustable and can be removed if necessary for large samples.

Specification

  • Specimen stage: Adjustable height universal stage with 6 holes for stubs
  • Vacuum chamber: 165mm internal diameter x 135mm high
  • Target to stage distance: 50mm - 80mm
  • Pumping requirements: Pump to evacuate >10-3 mbar

Item ID #876.

Last Updated: 9th October, 2012

Polaron Emitech SC7640 Sputter Coater